Accessories
XYZ stage
An in-vacuum XYZ stage: micrometers on X/Y and a ball screw on Z. SS316 welded bellows give an all-metal seal that bakes to 200 °C.
Specifications
| Parameter | Value |
|---|---|
| DN16CF–DN40CF | |
| A | 195 mm |
| B | 90 mm |
| C | 163 ± 6 mm |
| D | 209 ± 6 mm |
| E | 126–176 mm |
| Clear bore | 17 mm |
| Resolution | 0.01 mm @ XY / 0.05 mm @ Z |
| DN40CF–DN63CF (Z-50) | |
| A | 289 mm |
| B | 130 mm |
| C | 244 ± 12.5 mm |
| D | 306 ± 12.5 mm |
| E | 222–272 mm |
| Clear bore | 40 mm |
| Resolution | 0.01 mm @ XY / 0.05 mm @ Z |
| DN40CF–DN63CF (Z-150) | |
| A | 389 mm |
| B | 130 mm |
| C | 244 ± 12.5 mm |
| D | 306 ± 12.5 mm |
| E | 222–372 mm |
| Clear bore | 40 mm |
| Resolution | 0.01 mm @ XY / 0.05 mm @ Z |
| DN40CF–DN100CF (Z-50) | |
| A | 289 mm |
| B | 130 mm |
| C | 179 ± 12.5 mm |
| D | 244 ± 12.5 mm |
| E | 222–272 mm |
| Clear bore | 40 mm |
| Resolution | 0.01 mm @ XY / 0.05 mm @ Z |
| DN40CF–DN100CF (Z-150) | |
| A | 389 mm |
| B | 130 mm |
| C | 179 ± 12.5 mm |
| D | 244 ± 12.5 mm |
| E | 222–372 mm |
| Clear bore | 40 mm |
| Resolution | 0.01 mm @ XY / 0.05 mm @ Z |
- 0.01 mm X/Y, 0.05 mm Z
- All-metal bellows seal
- Several CF size pairs