Accessories
XY stage
An XY micrometer stage for in-vacuum alignment. SS316 welded bellows keep an all-metal seal that bakes to 200 °C.
Specifications
| Parameter | Value |
|---|---|
| DN16CF–DN16CF | |
| A | 157.5 ± 5 mm |
| B | 157.5 ± 5 mm |
| C | 51 mm |
| Resolution | 0.01 mm |
| DN16CF–DN40CF | |
| A | 157.5 ± 5 mm |
| B | 157.5 ± 5 mm |
| C | 51 mm |
| Resolution | 0.01 mm |
| DN40CF–DN40CF | |
| A | 244 ± 12.5 mm |
| B | 244 ± 12.5 mm |
| C | 80 mm |
| Resolution | 0.01 mm |
| DN40CF–DN63CF | |
| A | 244 ± 12.5 mm |
| B | 244 ± 12.5 mm |
| C | 80 mm |
| Resolution | 0.01 mm |
| DN63CF–DN63CF | |
| A | 330 ± 12.5 mm |
| B | 330 ± 12.5 mm |
| C | 144 mm |
| Resolution | 0.02 mm |
- 0.01–0.02 mm resolution by size
- All-metal bellows seal
- Matched CF pairs from DN16 to DN63